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The first electrochemical actuator with a parylene bellows for intraocular drug delivery is presented in which the bellows separates the electrolysis actuation chamber from the drug reservoir. The parylene bellows was fabricated using a novel polyethylene glycol (PEG)-molding process and mechanically characterized. Optimization of the gas generation efficiency of the actuators was performed. We achieved...
A fully functional oscillator has been developed, based on a resonator with an electrostatic-to-piezoresistive transduction. Both resonator and amplifier IC have been processed on a SOI wafer with identical SOI layer thickness of 1.5 mum. The resonator is a bulk-acoustic 'dogbone' design, for which an extended electrical model is presented. At an oscillation frequency of 56.1 MHz the oscillator consumes...
A high-density planar microelectrode system (HD-MEA), based on complementary metal-oxide-semi-conductor (CMOS) microelectronics technology has been used for in vitro recordings of extracellular potentials. At the same time, subcelllular lateral resolution and high temporal resolution (sampling at 20 kHz) of cellular electrical activity have been achieved at unprecedented signal quality (noise levels...
A fully integrated innovative micro system for biochemical analysis is presented. Direct electrical detection by means of an electrochemical method is used. In contrast to state-of-the-art optical methods, this allows for a simple cost-optimized realization of sensor systems with high sensitivity. The system integration is based on a standard CMOS process. Referring to the example of a DNA sensor...
We report in-vitro multisite field potential recordings from fish retina using a vertically integrated silicon (Si) microprobe array. Eight active channels of the enlarged probe-head ldquoKokeshi (Japanese dolls)rdquo type Si probe enabled multisite electrical recordings of retinal responses (electroretinograms (ERGs)) to white light stimuli. The ERG a- and b-waves were obtained at each probe, and...
We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration,...
This paper presents a novel method for in-situ formation of an ion-doped porous structure for high sensitive humidity sensing utilizing low-cost UV sensitive epoxy. Nano-size granular polymer structures can be directly deposited on a substrate by exposing a UV sensitive epoxy in an organic solvent of alcohol. SEM observations indicate that the deposited porous structure is constructed by stacking...
An interconnect technology for out-of-plane biomedical probe arrays has been demonstrated. The shafts of the probe array are assembled perpendicular to a common base or platform. During assembly of the probes a mechanical and electrical connection has been made. In order to assess the integrity of the assembly, a pulling test has been done. Recently the interconnect density has been improved to a...
We present novel metallic/bimetallic (Pt, Au-Pt) nanoparticle-decorated carbon nanotubes and bilirubin oxidase-decorated carbon nanotubes deposited on nano-tube buckypaper as promising supported electro-catalytic systems and as electrode material respectively for mixed-reactant biofuel cell applications at neutral pH. We found that the novel enzyme-decorated carbon nanotubes on nanotube buckypaper...
We have developed novel mask materials against HF Vapor release for MEMS/NEMS. Parylene-C has a tolerant material against moisture pass, and then, thin aluminum layer has also tolerant against HF vapor. We combined them together for high tolerance and we have successfully obtained completely non-etched silicon oxide layer under HF vapor exposure by Parylene/Al/Parylene sandwich structure.
We report on a micro vortex in a droplet induced by surface acoustic wave acoustic streaming (SAW-AS), which is applicable as a stirrer in micro fluidic devices. Fine controllability of the flow rate in a micro vortex was revealed using two flow-tracking methods with colored aqueous fluids, or scattering laser beams by distributed particles. We performed two practical tasks of a micro stirrer as an...
High-quality real-time muscle activity signals are important for advanced natural control of intelligent powered prosthetic limbs. This paper presents a wireless implantable electromyogram (EMG) sensing microsystem design for intelligent myoelectric control of powered prostheses. The implantable system, consisting of two Pt-Ir epimysial EMG electrodes, a custom-designed ASIC and an RF coil, is capable...
We developed the novel type of droplet generator for the bio-chemical reactions, and designed it by considering Reynolds and Weber numbers. The Si droplet generator was fabricated on a silicon-on-insulator wafer by using deep-reactive ion etching and was fixed in a piece of heat-shrinkable tubing by heating the tubing. We experimentally confirmed that the fabricated droplet generator formed droplets...
The flexure of microstructured polymers affects hydrophobicity. As curvature becomes more positive, droplets suspended on the tops of asperities are suspended on fewer asperities, resulting in an increase in contact angle and a decrease in slide angle. Critical curvature constraints presented here can be used to design microstructure geometries that maintain the suspension of a droplet when curved...
We proposed a temperature-controlled miniaturized cell for use in a magnetic beads handling system for bio-chemical reaction, especially for PCR usage, and created it by using conventional high-precision processing technologies. The proposed system consists of four temperature-controlled cells (designed for PCR use), a flow channel, a permanent magnet, and a compact linear actuator for driving the...
This paper presents localized cell lysis using a self focused acoustic transducer (SFAT). The 18 MHz acoustic waves generated by the SFAT focus at a spot of around 100 mum in diameter with a peak intensity of 25 W/cm2, which is strong enough to produce acoustic cavitation at such high frequency. With the great pressure and temperature produced by the cavitation, cells are broken and detached in a...
A microfabricated compound eye lens, compatible to a natural compound eye shows a spherical arrangement of integrated optical units called artificial ommatidia. Each consists of a self-aligned microlens and waveguide. The increase of the waveguide length is an indispensible prerequisite for obtaining high resolution images through an artificial compound eye for wide field-of-view imaging as well as...
We report on a novel optoelectronic tweezers (OET) that integrates with multilayer PDMS based microfluidic devices for the first time. This is realized by coating the PDMS channels with a Au mesh electrode capable of providing an electrically conductive and optically transparent surface that bonds with an OET surface as well. Microfluidic integrated OET not only allows continuous delivery of biological...
In this paper, we have successfully demonstrated the capability of a direct-write piezoelectric poly(vinylidene fluoride) (PVDF) nanogenerator using near-field electrospinning (NFES). Repeated and consistent output voltage up to 8.5 mV has been generated under an external strain of 0.092% from a single electrospun PVDF nanofiber, of which the output power is approximately 7.2 pW. We believe this technology...
This paper presents the wafer-scale manufacturing of microactuators based on bulk shape memory alloy material integrated using adhesive bonding. The work addresses key technical challenges related to the wafer-scale fabrication of bulk SMA micro actuators, including wafer-scale integration of patterned SMA sheets to structured Si wafers and the integration of cold state reset layers to the microactuators...
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