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We investigate the effects of lens aberration on spatial resolution of electron energy-loss spectrometry (EELS) in the transmission electron microscope. We compare the results of the quantum mechanical imaging theory of inelastically scattered electrons with the assumption of a Lorentzian angular scattering distribution. Our results show that this simple geometric approach can significantly deviate...
High spatial resolution elemental maps have been demonstrated in studies of Y + implanted alumina and Al/Ti multilayer specimens using energy-filtered transmission electron microscopy. A spatial resolution of ≈2nm is achieved. Aluminum containing particles formed in Y + implanted alumina have been identified using energy-filtered images formed with plasmon energy-loss electrons. Noncrystalline...
An energy filtering transmission microscope can provide information about the spatial distribution of an element by selecting an energy loss corresponding to a characteristic inner-shell excitation. One parameter affecting the obtainable resolution, as well as the detection limit of such core-loss images (elemental maps), is the signal to noise ratio. Statistical noise due to low inelastic cross-sections...
Energy filtered microscopy using a post column filter has been applied in a variety of materials characterisation problems to demonstrate its use with a field emission transmission electron microscope. We have shown that the technique, when combined with sample preparation methods such as the focussed ion beam technique, enables the imaging of large fields of view for general analysis and also high...
Methods of electron-probe microanalysis (EPMA), with some input from scanning and transmission electron microscopy (SEM/TEM), are applied for the identification of micro-scale constituents in a solid matrix. The subject of the study is a magnesium alloy composite, which contains silicon carbide-based fibres made by a liquid metal infiltration process. Backscattered electron imaging of the composite...
In the case of coherent illumination, knowledge of the phase and the amplitude of a light wave constitutes complete information. Phase and amplitude information can now be simply acquired using the technique of quantitative phase microscopy. It has been shown that this information allows other imaging modalities to be emulated. In this paper we consider how this information may be used to perform...
Non-destructive measurement of a small region on a solid/liquid interface is of great importance in physical chemistry and biochemistry, especially in the research of thin films and cell membranes. Optical methods for surface analysis with high lateral resolution are suitable methods for monitoring them. We now report a new scanning optical microscopic method to which total internal reflection coupled...
We demonstrate atomic-column imaging by scanning transmission electron microscopy (STEM) and electron energy-loss spectroscopy (EELS). The silicon atomic-columns of a β-Si 3 N 4 (001) specimen are clearly resolved. The atomic-site dependence and the energy-loss dependence of the spatial resolution are elucidated on the basis of the experimental results and multislice calculations....
We demonstrate atomic-column imaging by scanning transmission electron microscopy (STEM) and electron energy-loss spectroscopy (EELS). The silicon atomic-columns of a β-Si 3 N 4 (001) specimen are clearly resolved. The atomic-site dependence and the energy-loss dependence of the spatial resolution are elucidated on the basis of the experimental results and multislice calculations....
The spatial resolution and the indexing quality obtained with an automated orientation and phase mapping tool are analyzed for different Transmission Electron Microscope (TEM) illumination settings. The electron probe size and convergence angle are studied for two TEM configuration modes referred as microprobe and nanoprobe modes. Using a 10μmC2 aperture in a FEI Tecnai F20 (S)TEM, the nanoprobe mode...
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