The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Monitoring and controlling cross-wafer and in-die variability has been recognized as the dominant and escalating factors for the successful commercialization of modern-day integrated circuit products utilizing advanced semiconductor manufacturing. In this paper we present a Performance Based Metrology (PBM), a measurement technology for closing the information gap between the design, process integration,...