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Four micro-acceleration switches, which have different support beams layout, were designed; four finite element analysis (FMA) models of these micro-acceleration switches were set up. By using the FEA models, the modal analysis and the harmonic response analysis of the micro-acceleration switches were performed. The first 6 order natural frequencies and mode shapes of the four micro-acceleration switcher...
In this paper, analysis of characteristics of capacitive membrane-type RF MEMS switches, have been developed on the basis of the finite element method. Both the static and modal analyses of the switches are conducted. The characteristics including the displacement, stress, effective stiffness constant, natural frequency, and switching time are studied. The structures of the switches are critical for...
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