The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Przedstawiono procesy precyzyjnego trawienia cienkiej warstwy AlGaN dla technologii tranzystorów HEMT AlGaN/GaN. Trawienia cienkich warstw AlGaN prowadzono w plazmie dużej gęstości BCI₃/Ar uzyskując szybkości trawienia na poziomie 10 nm/min. Dla metalizacji Ti/Al/Ni/Au najniższą wartość rezystancji kontaktu AI₂₈Ga₇₂N/(Ti/AI/Ni/Au), wynoszące Rc= 1 Ωmm i rc = 2 • 10 ⁻⁵ Ωcm², zaobserwowano dla głębokości...
In this paper, we present high performance 0.25mum gate-length self-aligned AIGaN/GaN HEMTs on 6H-SiC substrates using a single ohmic step. Our recently developed Mo/Al/Mo/Au-based ohmic contact requiring annealing temperatures between annealing temperatures 500 and 600degC was utilized. Ohmic contact resistances between 0.3 - 0.5 ohm-mm have been achieved.
In this work we report AIGaN/GaN HEMTs with nonalloyed ohmic contacts by large angle ion implantation with a contact resistance to the channel of 0.2 Omegamm.
The paper reports on the characteristics of N-face AlGaN/GaN/AlGaN HEMTs. Ohmic contact optmization experiments based on the Ti/Al/Ni/Au metallization scheme commonly used for Ga-face AlGaN/GaN HEMTs were carried out and a low contact resistance of 1.3 Ohm/mm was achieved. The devices were then characterized before and after SiN passivation. Before passivation, large current dispersion was observed...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.