Search results
Journal of Microelectromechanical Systems > 2017 > 26 > 6 > 1442 - 1448
IEEE Transactions on Semiconductor Manufacturing > 2013 > 26 > 2 > 214 - 220
IEEE Transactions on Dielectrics and Electrical Insulation > 2010 > 17 > 2 > 582 - 587
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 3 > 481 - 485