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Journal of Microelectromechanical Systems > 2014 > 23 > 6 > 1463 - 1470
IEEE Transactions on Terahertz Science and Technology > 2011 > 1 > 1 > 313 - 320
Journal of Microelectromechanical Systems > 2014 > 23 > 6 > 1463 - 1470
IEEE Transactions on Terahertz Science and Technology > 2011 > 1 > 1 > 313 - 320