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A fully integrated innovative micro system for biochemical analysis is presented. Direct electrical detection by means of an electrochemical method is used. In contrast to state-of-the-art optical methods, this allows for a simple cost-optimized realization of sensor systems with high sensitivity. The system integration is based on a standard CMOS process. Referring to the example of a DNA sensor...
This paper presents a microfabricated 2 times 3 array oxygen sensor integrated with heaters and temperature sensors for measuring cellular respiration level in a solution containing cells. The proposed oxygen sensor consists of 2 times 3 array Clark-type sensors, heaters, and temperature sensors on the substrate. Pt was used for temperature sensors, working electrode and counter electrode of Clark-type...
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