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To control deposition profile of carbon films in trenches, we have studied substrate temperature dependence of deposition rate of carbon films and we have realized anisotropic deposition of carbon films in trenches above 250° deposited by CVD plasma of toluene diluted H2, in trenches. Here, we report dependence of properties of plasma CVD carbon films on substrate temperature.
This paper investigates structural and mechanical properties of present carbon overcoats for a number of sliders and disks manufactured by various vendors. Raman spectroscopy is first used to identify the morphology of the carbon overcoats and to evaluate to what extend the carbon films show differences for films manufactured by different vendors. In addition, characterization of the mechanical properties...
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