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The biocompatibility of Nanostructrued TiO2(NST) makes it a promising material in biological applications. Recently reported aqueous oxidation technology synthesizes NST at very low temperature, which is CMOS compatible. It suggests NST a very promising candidate for cell/electronics interfacing. However, severe cracks have been observed beyond a threshold dimension (20μm × 20μm). In this study, the...
Nanostructured titania (NST) is attracting more and more attention due to its porousness and high surface to volume ratio. A novel process to fabricate integrated NST thin film at low temperature (80-90??C) is presented. NST features were formed by oxidizing Ti films in aqueous hydrogen peroxide. The optimal conditions of aqueous oxidation are: 85??C, aqueous 10% H2O2 solution, 20 min of water bath...
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