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IEEE Systems Journal > 2017 > 11 > 1 > 305 - 314
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 1 > 118 - 127
IEEE Systems Journal > 2017 > 11 > 1 > 305 - 314
IEEE Transactions on Semiconductor Manufacturing > 2012 > 25 > 1 > 118 - 127