Abstract Slurry sampling followed by electrothermal vaporization was used as sample introduction technique for digestion-free analysis of aluminium nitride and aluminium oxide by inductively coupled plasma atomic emission spectrometry. The vaporizer consisted of a tungsten coil in a quartz chamber. Spectral interferences and background emission caused by tungsten ablation from the coil were reduced by coating it with tungsten carbide. Different approaches for background correction techniques were considered. The analytes Ca, Cd, Co, Cr, Cu, Fe, Mg, Ni and Zn were determined simultaneously, whereas Mn and Na were determined in the sequential mode. Calibration was performed using the standard additions method. The accuracy was checked by comparison of the results with those of independent methods. Detection limits between 0.01 (Mg) and 8.5 g/g (Co) were achieved.