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Micro Hotplates are extensively used in chemical sensor, flow sensor and other micro systems. In this paper, we have presented the design, modeling and simulation results of serpentine, spiral and fan shape micro heaters based on standard Multi User MEMS Process for fabrication in a multi product wafer run. The heater structure was optimized to get good temperature homogeneity, low power consumption...
MIL-101-Fe (Materials of Institute Lavoisier) nanoscale-metal organic frameworks (NMOFs) were synthesized by solvothermal method with constant heating at 200°C in silicon oil bath. The as prepared MIL-101-Fe nanoparticles are observed to have particle size in the range of 200–210 nm with multiple shape morphology. Further as prepared MIL-101-Fe are functionalized by incorporating amine group into...
The Dual-Probe Heat-Pulse technique has been widely used for in-situ moisture sensing. In the heater probe described in our earlier work the power consumption was 350 mW-the lowest in this category of sensors. In this paper, by employing a material selection method, we further improve the performance of the sensor by employing Parylene-coated nichrome wire and different packaging methods. The power...
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