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The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.
A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
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