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For future 65 nm and smaller nodes, thermal anneal processes in the ms and mus range are required. Based on laboratory tests using the line scan method, an R&D system has been developed.
Laser micro-processing techniques are becoming commonplace in the industrial production of high-tech devices. As the limit of conventional manufacturing is reached, laser micro-processing presents itself as an enabling technology in a wide range of applications.
We demonstrated lasing in a microscopic cavity made of two nanoparticles in a homogeneous gain medium. The particles, either dielectric or metallic, acted as nano-mirrors. Such laser had well-defined lasing frequencies and produced directional output.
We will review the status of current laser based crystallization processes, and discuss the specifications and the critical design aspects of the laser and of the optical system developed for the TCZ production tool.
We introduce the notion of temporal superresolution for ultrashort pulses, by analogy with the well-known method of optical superresolution. Without spectral width modification we shape a pulse into a central peak of duration well below the Fourier limited.
In ultra-intense ultrafast laser-matter interaction, the interplay of laser-induced oscillating space-charge fields with laser E- and B-fields can strongly affect whether the interaction is relativistic or not; with increasing intensities, relativistic character may saturate.
This paper deals with the microstructure of the generated crystals in borate glass by femtosecond laser irradiation, Raman spectroscopy was used to study the distribution of the two phases of barium metaborate crystals produced.
A compact multi-loop stretcher system with a pulse confining structure was demonstrated. This system generated chirped pulse with 32 ps/nm chirp rate. The energy loss in the stretcher was compensated by the OPCPA.
We demonstrate uncooled 2.5 Gb/s operation up to 110degC of 1.3 mum GaInNAs double quantum well lasers with low threshold current and excellent temperature stability.
We show that the SU-8 epoxy resist can be exposed by two-photon absorption at 4 K, allowing spectroscopy and lithography to be performed by the same apparatus. We present a systematic study of the exposure parameters.
Fluorescence decay in ceramic Nd:YAG is distinctly nonexponential for concentrations greater than 1% atomic. This strongly affects the effective upper level storage time for high concentrations. The quenching mechanisms were determined, and are intrinsic.
Micron-size channels have been made inside silicon by femtosecond laser-assisted HF etching. The etching is guided by localized carriers generated via two-photon absorption. Its potential of 3-D drilling has been demonstrated.
We report on surface plasmon (SP) enhanced random lasing from a silver nanoparticle-laser dye system. The metal nanoparticle based random laser yielded a smaller bandwidth and pump fluence threshold than a dielectric based random laser.
2.35 mum GaSb-based diode lasers with QW compressive strains of 1.2 and 1.7% were designed and fabricated. Devices with heavily strained active region exhibit three times higher differential gain and half the threshold current.
A femtosecond laser micromachined multi-orifice two-dimensional silicon-nitride membrane array is reported to generate picoliter droplets. This device uses a higher-order resonance ejection mechanism, increases the flow rate per membrane and can eject from various locations on a membrane.
A novel approach is used to enhance by nearly two orders of magnitude the conversion efficiency of a 125 nm-coherent source, based on four-wave mixing in room-temperature mercury vapor. Saturation issues are observed and discussed.
Sub-38 nm spatial resolution imaging was achieved with a tabletop microscope based on zone-plate optics and a high repetition rate tabletop 13 nm wavelength laser.
A Ti:Sa laser using a combination of negatively- and positively-chirped pulse amplification (NPCPA) is demonstrated. The method suppresses spectral narrowing typically appearing in CPA lasers thus supporting bandwidth much broader than a conventional CPA.
We present a theoretical and experimental analysis of two-grating phasing in a broadband pulse mosaic compressor. The phase defaults induced by misaligned gratings and the grating gap effect are studied in a mosaic compressor scheme.
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