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This paper presents a CMOS biochip for DNA detection with an embedded current amplifier circuit by using self-assembly multilayer gold nanoparticles (AuNPs). The biochip is fabricated by a TSMC 0.35 mum 2P4M standard CMOS process and post-CMOS micromachining processes. On each measuring spot, there is a pair of electrodes with a gap distance of 350 nm. Through a self-assembly process between suspended...
In this paper we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The fast...
Poly (styrene-b-butadiene-b-styrene) (SBS) triblock copolymer templates which present in-plane cylinder pattern have been prepared by solvent-induced order-disorder phase transition method. Then silver clusters have been deposited onto the SBS copolymer templates by low energy clusters beam deposition (LECBD) apparatus. The characterization of samples by AFM with tapping-mode has shown that silver...
Nanojet means that the liquid is forced to pass through the nozzle with the nanosize diameter, we report here that nanojet was formed for the first time in lab by heating the PbO coated Pb clusters. In this experiment, the coated clusters are heated to more than 200 C and it was found that the inner Pb core melted and ran out from the cracked outer shell with a 200-nm-long(as long) trail. The in situ...
Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Applying voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, the...
The variation of the image quality and critical dimension (CD) uniformity due to the flare, geometrical aberrations and polarized light is studied in order to understand the implication on CD errors control. Some of the surprising phenomena, which occurring at high numerical aperture (NA), are studied with 2-dimension (2D) mask by calculating the latent images of 65 nm butting pattern. When the flare...
In this paper the thermal conductivities of monocrystal carbon, silicon, and germanium nanometer thin film are simulated respectively using non-equilibrium molecular dynamics (NEMD) method and corresponding Tersoff potential energy function. The simulation results indicate that the thermal conductivities of those nanometer thin films are obviously lower than the corresponding thermal conductivities...
A new ionomer of sulfonated ethylene vinyl alcohol copolymer, EVOH-g-SO3H was synthesized and the ionic polymer metal composite (IPMC) based on EVOH-g-SO3H polymer has been produced through electroless deposition of platinum on the bare polymer membranes. The actuation performance for IPMC actuator was tested in order to set up a relationship between the structure and the behavior. The morphology...
Quantitative friction measurement of nano materials in atomic force microscope (AFM) requires accurate calibration method for the lateral force. An improved calibration method for the lateral force of the cantilever in AFM is presented. The calibration factor derived from the original method increased with the applied normal load, which indicates that separate calibration should be required for every...
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