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A fabrication technology of microelectrode with nano radius of its tip was presented in electrochemical micromachining (EMM). The mechanism of pulses EMM was expatriated firstly. The shaping principle of microelectrode and micro probe was analyzed. Based on the fundamental experimental behavior of EMM current, a control strategy of current density was proposed with the gap variance. Then an experimental...
Hydrogenated and oxygenated nano-crystalline boron-doped diamond (BDD) films were prepared by hydrogen-plasma treatment and boiling in the strong acids, respectively. Surface characteristics of the two diamond films have been investigated by scanning electron microscopy (SEM) and Raman spectroscopy. In order to clarify detailed electronic structures of surface-treated nano-crystalline diamond films,...
For nano-metric positioning and manipulation, a single-crystalline-silicon XY-stage is fabricated by using a double-sided bulk-micromachining technology. For defining different electrostatic actuators in one ordinary wafer (instead of SOI wafer), a trench-sidewall electric isolation method is developed. Previously insulator-refilled trench-bars are used to cut and isolate the different comb-drive...
A new type of bio-chemical sensor based on SPM was designed and fabricated in this paper. The bio-chemical sensor uses the SPM head as the probe part, which can convert the physical variation quantity on the micro-cantilever to electrical signals, and finally change it into image. In the experiment, the bio-chemical sensor based on SPM is used to detect two kinds of ssDNA molecules in PBS solution...
Three SPM-based techniques are put forward to fabricate 1D and 2D nanoscale reference materials, i.e. atomic force microscopy (AFM) tip-induced anodic oxidation on Si substrate, scanning tunneling microscopy (STM) current-induced oxidation on Ti film as well as AFM tip-scratching on Au film. The experimental parameters are analyzed and classified. For AFM tip-induced anodic oxidation on Si substrate...
The sensitivity and stability are mainly factors to hold back the practical applications of Polypyrrole coated fabrics. In this paper, a flexible fabric strain sensor with high sensitivity, good stability and large deformation is reported. It is fabricated by depositing a nano-layer (200nm to 300nm) of polypyrrole on the fabric substrate at low temperature. Thickness and morphology of the conducting...
Near-field microwave probes were developed and used to image electromagnetic properties of materials with spatial resolutions only limited by the probe aperture size, signal-to-noise ratio and not by the Abbe barrier. The price of this "super" resolution is point-by-point scanning of the sample that makes it slow and requires additional mechanisms to control the probe-to-sample distance...
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