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This paper presents the optimized design of a novel Focal Plane Array (FPA) structure for opt-mechanical uncooled infrared imaging system. The FPA structure is a bi-material micro-cantilever array which without Si substrate and with thermal isolation organ. In the paper, we build up series of model to describe the structure's IR absorb, heat exchange and thermal-mechanical characters. To optimize...
According to the thermal-optical effect and the elasto-optical effect, the relationship of the refractive index with the temperature and the stress of the optical window in the aerodynamic environment is obtained. Based on building the model of grid, ray-tracing in optical window is carried out. Then a novel method to correct the wave-front and reduce the blurring caused by aero-optical effect is...
Grating moving light modulator, a MEMS-based movable diffraction grating with electrostatic actuation, can be used for projection displays and relevant applications, its dominant power exchange is between the 0th and plusmn1st order by modulating phase of incident light, two optical collecting systems based on 0th, plusmn1st order operation are designed and analyzed with Fraunhofer diffraction theory...
To improve the operating efficiency, a novel optical light modulator, called reflector moving grating light modulator (RMGLM), is presented. It consists of a fixed grating plate, address electrode, support structure, and a movable reflector, piston-type motion of the reflector can be used to modulate the phase of incident light. The RMGLM optical performance is theoretically analyzed with Fourier...
A new type of grating light modulator (GLM) for display application has been presented. It has the advantages of the MOEMS modulator. Meanwhile, it is easy for integration of array device and reduces the fabrication complication. The modulation principle and the fabrication results are given. Some methods to enhance the quality of the GLM are proposed. To enlarge the effective optical area, the central...
In recent years, high resolution metrology up to nano-scale has attracted substantial attention due to the increasing need of ultra precision measurement systems for MEMS and NEMS calibration. In this paper, an analytical and numerical investigation for the proposed design of a 6-degree-of-freedom (6-dof) universal ultra precision metrology system using relatively simple and inexpensive but highly...
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