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A terahertz (THz) waveguide-fed circularly polarised (CP) antipodal exponentially tapered slot antenna (AETSA) is designed, fabricated and measured. This antenna is fed by a WR2.2 rectangular waveguide. The integrated AETSA is fabricated by deep reactive-ion etching on silicon wafers, gold-sputtering and gold-gold thermo-compression bonding. Optimised exponential curves are introduced to the profiles...
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