# Journal of Microelectromechanical Systems

Journal of Microelectromechanical Systems > 2015 > 24 > 1 > 29 - 37

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_{2}-based microelectromechanical systems actuators. The device is operated electrothermally using integrated resistive heaters. The coupling of the abrupt electrical and mechanical changes in VO

_{2}films across its phase transition allow for the estimation of the device’s deflection by monitoring the film’s resistance...

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