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This paper demonstrates integration non-destructive analysis tools solution of MEMS multi-bonding to inspect the fusion bonding interface and eutectic bonding interface to locate defect layers. This analytical study shows successful SAT (Scanning Acoustic Tomography) and IROM (Infrared Optical microscopy) inspection of MEMS multi-bonding single issue layer. The multi-bonding double layers were happened...
In this study, we implemented the backside PLS (Photoelectric Laser Stimulation) based circuit edit on an analog circuit block of a mixed-signal IC (Integrated Circuit). In this technique, a laser with the wavelength in the NIR (Near Infrared) range is employed to optically stimulate the DUT (Device under Test) at the transistor level, and impact optically its electrical performance including threshold...
In this study, we introduce high-resolution X-ray tomography into the daily failure analysis (FA) work flow for semiconductor packages. Two application cases, the investigation of Back-end of line (BEOL) and μ-bump features have been selected to demonstrate its advantage. The paper focuses on a feasibility study for different measurement parameters and proposes an advanced FA flow including newly-developed...
Transmission electron microscopy (TEM) plays an important role in the structural analysis and characterization of materials for failure analysis in integrated circuit industry as device shrinkage continues. It is well known that a high quality TEM sample is the important factor. When the TEM sample was in preparation for cross-section or plane analysis, curtain effect and positioning are the problems...
In this paper, the gated imaging technique of dynamic photon emission is realized and introduced as a powerful localization tool by using a low-cost near-infrared InGaAs image intensifier (I.I). At first, the setup and the method for gated imaging of photon emission microscope (GI-PEM) are presented. As one of global localization tools, it shows an unique and economical debugging and pinpointing capabilities...
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