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Although a variety of carbon nanotube field-effect transistors (CNTFETs) have been successfully fabricated, the contact property between multi-walled carbon nanotubes (MWCNTs) and electrodes is still elusive. In this study, we aims at further characterizing the contact properties among MWCNTs, Au electrode (gold coated glass substrate) and tungsten deposit. First, an atomic force microscope (AFM)...
Electron-beam-induced deposited-tungsten (EBID-W) technique is used to fabricate contacts for carbon nanofiber (CNF) horizontal interconnect and carbon nanotube (CNT) vertical vias to improve the contact resistances at the nanocarbon-metal electrodes.
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