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In order to develop miniaturized and integrated electron vacuum devices, the multi-beam modulation in a carbon nanotube (CNT) cold cathode electron gun is investigated. Steady field-emission electron beams are modulated in an electron gun by feeding a high-frequency field between the cathodes and the anode. Simulation results of multi-beam electron gun show that phase modulation of beam can be controlled...
In this paper we discuss first realization and preliminary parameters of the electronoptics MEMS column equipped with a field-emitting electron gun and an Einzel lens. The column is made in a form of the sandwiched silicon stack. Silicon elements are deep wet micromachined and placed in a polymer 3D printed holder. Cathode is made of carbon nanotubes deposited by use of the electrophoretic process...
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