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An electrochemical amperometric sensor measures the electric current on the surface of the working electrodes and estimates the concentration of chemical or biological species. Electrochemical sensor is fast and selective but electrochemical sensing is a complex phenomenon involving both physical and chemical processes. With a view to understand the basic operation of electrochemical sensor, present...
Micro Hotplates are extensively used in chemical sensor, flow sensor and other micro systems. In this paper, we have presented the design, modeling and simulation results of serpentine, spiral and fan shape micro heaters based on standard Multi User MEMS Process for fabrication in a multi product wafer run. The heater structure was optimized to get good temperature homogeneity, low power consumption...
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