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When microcolloid particles are used as seeds in biologic and chemical experiments, they are often considered to be neutral. However, our experiments have proved that the charge on seeds can be significant in electrickinetic flow even if micro- particle's diameter is less than 500nm. A combination method of particle tracking velocimetry (PTV) and current method velocimetry has been proposed to measure...
(FePt)1-xCux alloy nanoparticles were prepared by chemical-reduction of platinum acetylacetonate, iron acetylacetonate and copper acetylacetonate with 1,2-hexadecanediol as the reducing regent. As prepared, the particles have a disordered fcc structure with an average diameter of ca. 3nm. The addition of 4 % copper promotes the effect that the disordered fcc structure transforms to ordered fct phase,...
A large-inductance inductor using double-layer coils on HR (high-resistance) substrate is presented. The design is based on the analytical equation of mutual inductance and the current direction of the coils on different layers. The inductor is realized with a micro-machined process which is compatible with standard CMOS process. To evaluate the performance of double-layer coil inductor, a single-layer...
The variation of the image quality and critical dimension (CD) uniformity due to the flare, geometrical aberrations and polarized light is studied in order to understand the implication on CD errors control. Some of the surprising phenomena, which occurring at high numerical aperture (NA), are studied with 2-dimension (2D) mask by calculating the latent images of 65 nm butting pattern. When the flare...
A new ionomer of sulfonated ethylene vinyl alcohol copolymer, EVOH-g-SO3H was synthesized and the ionic polymer metal composite (IPMC) based on EVOH-g-SO3H polymer has been produced through electroless deposition of platinum on the bare polymer membranes. The actuation performance for IPMC actuator was tested in order to set up a relationship between the structure and the behavior. The morphology...
Poly (styrene-b-butadiene-b-styrene) (SBS) triblock copolymer templates which present in-plane cylinder pattern have been prepared by solvent-induced order-disorder phase transition method. Then silver clusters have been deposited onto the SBS copolymer templates by low energy clusters beam deposition (LECBD) apparatus. The characterization of samples by AFM with tapping-mode has shown that silver...
Fraction collection following DNA electrophoresis has many applications in biology analysis. These assays typically need to identify specific DNA fragments in the separated sample for further processing and require extraction of one or a group of fragments. Unfortunately, the conventional methods involve cumbersome procedure and are not amenable to integration, automation and extraction of microscale...
The paper presents a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media...
The paper describes an approach for preparing probes for combined SPM techniques, such as scanning electrochemical microscopy (SECM)/photoelectrochemical microscopy (PEM), SECM/near-field scanning optical microscopy (NSOM). The SECM/PEM probes were constructed firstly by stripping off a single mode optical fiber's polymer coating (125 mum diameter of cladding) at one end. The stripped optical fibers...
The plug-like fluidic profile is one of most advantages of electroosmotic flow, which influences the reproducibility, sensitivity and separation efficiency of the microfluidic devices. Electroosmotic flow in microchannels with hydraulic diameters of less than 20 microns are investigated experimentally and qualitatively compared with prediction in electric double layer (EDL) theory. Fluidic profiles...
A facile approach to the surface oxidation of multi-walled carbon nanotubes (MWCNTs) is presented using oxidation solution to decorating MWCNTs, sonication to promote this effect and increase the population density of surface oxide groups. The sonication short time for MWCNTs oxidation /functionalization is desirable for minimizing structural damage to the MWCNTs that could lead to changes in their...
Sn-Ag-O thin films were deposited by DC magnetron co-sputtering in a gas mixture of Ar and O2. The microstructure and morphology of the thin films were characterized by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The Sn2.3 AgO0.9 and Sn1.3AgO0.6 film films deposited at room temperature showed a mixture of crystalline and glassy structure in XRD patterns, whereas...
We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (force sensitive resistor) polymer, MWCNT, and polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed...
As the optical alignment system for lithography cannot be compatible with the equipment and the manufacturing process in nanofabrication with scanning probe microscope, new precision alignment methods are required. In this paper, we investigated ultra-precision alignment system especially to the overlay in SPL technology and completed the fabrication of two-layer graphics by AFM oxidation. On the...
This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot...
A new type of grating light modulator (GLM) for display application has been presented. It has the advantages of the MOEMS modulator. Meanwhile, it is easy for integration of array device and reduces the fabrication complication. The modulation principle and the fabrication results are given. Some methods to enhance the quality of the GLM are proposed. To enlarge the effective optical area, the central...
Most of the biosensors are based on the enzymatic electrochemical analysis and are disposable due to the use of the enzymes that are living creatures. Thus, these are limited to the in-vivo and handheld continuous monitoring sensor system applications. In this paper, a nano-hole (mesoporous) arrayed Pt electrode is investigated for developing the non-disposable electrochemical sensors without using...
This paper presents a systematic modeling and design methodology for microfluidic concentration gradient generators. The generator is decomposed into a system of microfluidic elements with relatively simple geometries. Parameterized models for such elements are analytically developed and hold for general sample concentration profiles and arbitrary flow ratios at the element inlet, hence they are valid...
To improve the operating efficiency, a novel optical light modulator, called reflector moving grating light modulator (RMGLM), is presented. It consists of a fixed grating plate, address electrode, support structure, and a movable reflector, piston-type motion of the reflector can be used to modulate the phase of incident light. The RMGLM optical performance is theoretically analyzed with Fourier...
Thrust ripple such as side force, slot force and normal force is key factor which affects the properties of permanent magnet linear synchronous motors (PMLSM). Furthermore, model uncertainties and disturbances greatly affect the PMLSM's motion properties too. Side force was greatly decreased by optimizing the length of the PMLSM mover, and slot force caused by slot effect was greatly reduced by using...
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