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Various sensing characteristic of carbon nanotube synthesized by low press chemical vapor deposit (LPCVD) method have been studied. The composite sensing film of silicon dioxide and multi-wall nanotubes (SiO 2-MWNTs) is sensitive to methane. The various characteristic such as sensitivity, repeatability, reliability and cross-sensitivity of SiO2-MWNTs composite film gas sensor have been studied. Having...
In this paper, nano-porous silica aerogels were prepared via sol-gel process with acid/base two-step catalysis technique. Silica aerogel structure can be effectively controlled by changing experimental parameter. Ultralow density silica aerogel with density as low as 3.4 mg/cm3 has been successfully prepared. Transmission electron microscope (TEM), gas chromatography/mass spectrometry (GC/MS) and...
The design and testing of micro thermophotovoltaic (micro-TPV) system is described in this paper. The system is made of a SiC emitter, a dielectric filter and a GaSb photovoltaic cell array. The open-circuit voltage and short-circuit current can be measured by a multimeter, and the output power can be calculated. The effect of mass flux and the distance between the PV cell and outer wall of the combustor...
This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot...
Using single-crystal Bi2S3 nanowires, we successfully fabricate nanodevices on Si substrate by e-beam lithography. Field-effect as well as novel optoelectronic properties have been obtained from the devices. Under visible or UV light illumination, the conductivity of Bi2S3 nanowire raises several to several orders times within milliseconds due to the generation of electron-hole pairs. Illuminating...
Two step acid-base catalyzed silica xerogels which had integrated structure were prepared through sol-gel and ambient pressure drying. Silica xerogels powder, TiO2 powder and short fibers were added as the additives in order to improve the properties of silica xerogels. The porous structure was estimated by the means of nitrogen adsorption method and mercury intrusion porosimetry (MIP). According...
High yields of multi-walled carbon nanotubes are synthesized by chemical vapor deposition of acetylene on palladium nanoparticles supported on porous SiO2. HRTEM results reveal that the carbon nanotubes have novel conical inner structure. By changing the content of palladium in the catalyst, we obtained palladium nanoparticles with different diameter distribution. It was found that the apex angles...
Conventional nanoparticles were directly synthesized in single film by PVD or CVD process. In this paper, we proposed a novel approach to the growth of SiC nano-particles (np-SiC) by thermal annealing of C/Si multilayers deposited on single crystalline Si (100) substrates using ion beam sputtering system (IBS). The deposition of C/Si multilayers was performed at room temperature under ultra high vacuum...
Novel local curvature test structures combined with a sub-nanometer optical interferometry measuring setup have been developed to detect stresses in nanometer-scale films as well as ultra low stresses in thin films. Stress difference as small as 1.5 MPa within a 30 nm film can be resolved with this metrology, which is among the best in the present reports. Residual stresses in thermal SiO2 and LPCVD...
Study on the relationship between the breakdown voltage and the nano-topography of electrode surface is presented. The bottom electrode is electroplated with three different current densities. The measured RMS roughness for the obtained electrodes is 27.4nm, 16.0nm and 5.4nm correspondingly. PECVD 300degC Si3N4 is deposited onto the electrodes as dielectric layer. After measuring the surface nano-topography...
Lack of batch-compatible fabrication techniques can be considered as the most important challenge in the integration of nanostructures with microelectromechanical systems (MEMS). A solution to the micro-nano integration problem is offered by introducing a batch-compatible nanowire fabrication technique based on basic lithographic techniques and guided self-assembly. The basic principle is obtaining...
This paper describes a micro thermal shear stress sensor with a cavity underneath, based on novel micro bumps on the silicon substrate and sacrificial layer. The micro thermal shear stress sensor has been designed and fabricated by micromachining technology. A poly-silicon strip, 4 mum times 200 mum, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element...
A comparative study of the micro-tribological properties of silicon-based component and octadecyltrichlorosilane (OTS) molecular lubricant film which was prepared on Si(100) substrate, and their adhesive and tribological properties were mainly investigated by AFM/LFM. Meanwhile, the effect of relative humidity and scanning velocity was taken into consideration. The results show that the adhesive force...
Electrowetting-on-dielectric (EWOD) is a promising method for manipulating tiny amounts of liquids. However, the miniaturization and the monolithic integration become the great challenges to improve the EWOD applications in actual lab-on-a-chip systems. In this paper, we present an IC-compatible digital microfluidic actuator, which uses silicon as the substrate and the thermally grown SiO2 film on...
This paper reports the theory, fabrication and testing of a novel uncooled infrared (IR) sensor using amorphous silicon thin film transistors (a-Si TFTs) as the active elements. The measured temperature coefficient of the channel current (TCC) of the a-Si TFT is about 4.18%/K at room temperature. What's more, finger-cross TFT is designed, which can greatly improve the detectivity of uncooled infrared...
Silicon carbide (SiC) is a promising material for the device operating in hash environment, such as high temperature, high pressure or erodent environment, owning to its excellent electrical, mechanical, and chemical properties. The PECVD process allows deposition of SiC at low temperature (200degC-400degC), which makes SiC has better compatibility in Post-CMOS processes. In this paper, PECVD SiC...
In this paper, a novel piezoelectric film based ultrasonic microspeaker array is proposed. The SiO2/Pt/Pb(Zr,Ti)O3 /Pt/Ti/SiO2 multimorph structure has been designed and fabricated using silicon based micro-machining process. The membrane size of the single transducer cell is 1000times1000times2.5 mum 3, and the main resonance frequency is located near 68kHz. The performance of directivity is a very...
A new process for self-aligned double gate MOS fabrication is proposed. The milestone of this process in the revelation of a buried mask in the BOX of a SOI wafer and in a thermal oxide layer on top of active silicon film. The revelation of the buried mask makes use of the highly selective etching of implanted oxide in VHF. The etching mechanism of VHF etching of oxide is presented and the influence...
The bulge test was successfully extended to the determination of the fracture properties of silicon oxide/silicon nitride thin film sandwiches. This was achieved by using long membranes and applying a comprehensive mechanical model describing the mechanical response of these membranes deflected into a plane-strain deflection profile under a differential pressure. The model is able to cope with thin...
In this paper, we focus on the wide-range temperature dependence of Brillouin shift in an optical fiber. We set about our study on the basis of the material properties of fused silica, including the Young's modulus, the Poisson's ratio, the refractive index, the density and the thermal expansion coefficient. We have built up mathematical model for the temperature dependence of each of the material...
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