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Piezoelectric material plays an important role in the extensive applications of microelectromechanical systems (MEMS). However, its thick-film fabrication process is still not well-established along with the MEMS development. Here we develop a thick-film microfabrication process specifically for the lead-zirconate-titanate (PZT) piezoelectric material. The growth of thick PZT film is facilitated by...
In this paper, a novel silicon micromachining using CO2 laser has been demonstrated for the first time. The wavelength of CO2 laser is 10.64 mum and not absorbed by silicon material. So, it cannot do any micromachining for pure silicon. However, as we put a silicon on the top of a glass material, CO2 laser can etch the silicon, even etch through the wafer to be a hole structure. For example, a silicon...
Thrust ripple such as side force, slot force and normal force is key factor which affects the properties of permanent magnet linear synchronous motors (PMLSM). Furthermore, model uncertainties and disturbances greatly affect the PMLSM's motion properties too. Side force was greatly decreased by optimizing the length of the PMLSM mover, and slot force caused by slot effect was greatly reduced by using...
Gecko has elaborate adhesive structure which allows it to move along vertical walls and ceilings quickly. There is strong evidence that the adhesion ability is due to van der Waals forces. Synthetic dry adhesive hairs inspired by gecko foot-hairs have been microfabricated by several groups. To obtain re-attachable dry adhesive hairs with mass production potential, ICP technique is employed to fabricate...
A new method for realization of 3D multilayer micro structures is presented in this paper. It consists of two major processes: silicon etching process and UV-LIGA process. In this way, some shape limitations of single technology can be overcome for new functions. By combining these processes, multilayer structures and complex graphics can be fabricated. To make good combination, the adhesive characteristics...
Optimization of drug delivery through human skin is important in modern therapy, and with the invention of painless microneedles makes it become true. This paper presents a novel fabrication process for a tapered hollow metallic needles array using nickel plating on the silicon microneedles molds. The silicon microneedles molds, with a shank height of 150-200 mum and 300 mum center-to-center spacing...
In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (muDMFC). Using the MEMS technology we have successfully made single muDMFC as small as 8mmtimes8mmtimes3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep...
With the rapid progress of ultra short laser technology, two photon photopolymerization(TTP) has been introduced into the domain of microfabrication. Its characterization and process are described in this paper as well as its experimental system. Through the relevant experiments, we optimized the spatial resolution of this method. Under the fine focusing, we obtain the minimum line width of 0.65 mum,...
Nanofabrication is the basis for any NEMS. How small a structure can be made? What are the available technologies for making nanostructures? These are the questions constantly asked by NEMS researchers. This paper gave an overview of current nanofabrication technologies and the challenges for NEMS applications. The techniques for making nanostructures are grouped into direct, indirect and self-assembly...
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