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In this study, basing on electrochemistry and MEMS technology we develop a novel biosensor with multi channels to detect three markers (hyaluronic acid (HA), Laminin (LN), type IV collagen (IV-C) ) so as to evaluate the liver disease. With MEMS technology, a chip including a CE, a RE and 6 gold electrodes is fabricated for detection of at most 6 markers simultaneously. Different antibodies of serum...
The theory, design, fabrication and measurements of a novel structure for measuring the power of microwave signals are presented based on MEMS technology. The advantage of this sensor is that it measures the microwave power coupled from the CPW line by the MEMS membrane. In this method the signal is available during the power detection. The fabrication of the novel power sensor is fully compatible...
5SPE (Solid phase extraction) method, which is compatible with MEMS (micro-electro-mechanical system) technology, has proven efficient and amenable to microfluidic chips. An SPE microfluidic chip for DNA extraction by using porous silicon dioxide as the solid phase matrix has been developed. Porous matrix coated on the wall of the channel in the microfluidic chip to provide a surface-enlarging matrix,...
The design and fabrication for a novel silicon-based micro direct methanol fuel cell (mu-DMFC) of 0.64cm2 active area on <100> silicon wafer are described in this paper. The novelty of the DMFC structure is that the anodic micro channels arranged in the asymmetric mesh have been fabricated, and the first objective of the experimental trials is to verify the feasibility of the novel structure...
In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (muDMFC). Using the MEMS technology we have successfully made single muDMFC as small as 8mmtimes8mmtimes3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep...
A novel method for constructing an automated cell fractionation system was developed by integrating traveling-wave dielectrophoresis (twDEP) and laminar flow on a single biochip-based device. Novel electrodes designs on indium tin oxide (ITO) glass and pre-molded poly(dimethylsiloxane) (PDMS) microfluidic chamber, as well as an automated cell tracking method based on a computer-assisted image analysis...
A new optimized structure for micro electromagnetic actuator is introduced based on the research done before. Three-dimensional structure and new fabricate process is adopted accordingly in this improved design. The new structure can diminish the leak of magnetic circuit and increase the magnetic force. An electromagnetic micro actuator is fabricated based on the MEMS technology. The size of the micro...
A novel amperometric immunosensor fabricated by microelectromechanical systems (MEMS) technology with a novel modified procedure for immobilization of antibody on gold electrode has been developed. Based on MEMS technology, immunosensor with a three-microelectrode system integrated with two SU-8 micro pools was fabricated. Employing self-assembled monolayers technique, the working electrode was modified...
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