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Nanoscale tweezers are integrated to deep reactive ion etching (DRIE)-processed microelectrodes by localized chemical vapor deposition using focused ion beam (FIB-CVD). The MEMS electrodes for electrostatic actuation of nano tweezers are fabricated on a heavily doped SOI wafer, which works as the interconnecting platform to control nanoscale device from macro-world. Unlike the carbon nano tube (CNT)-based...
This paper demonstrates a low cost MEMS variable optical attenuator (VOA) with high performance for the wavelength division multiplexed (WDM) applications. Two single-mode fibers (SMFs) are used as the input and output of VOA. A shutter is actuated into the optical path by an electrostatic comb-type actuator. The device is fabricated on a single silicon wafer by a novel simple bulk-silicon micromachining...
This paper derives a closed form solution with fringing filed effects for the pull-in voltages of the micro fixed-fixed beam subjected to electrostatic loads and initial stress. The closed form solution is derived based on the Euler's beam theory and the energy method. The accuracy of the present closed form solution is verified through comparing with the experimentally measured data conducted in...
Micro actuators using electrostatic repulsive-force induced by asymmetric electric field has no problem of pull-in instability existing in electrostatic attractive-force based micro actuators, and their stroke is not limited by the initial gap between electrodes. In this paper, an improved structure of micro actuator based on electrostatic repulsive-force is presented to achieve a large vertical stroke...
For nano-metric positioning and manipulation, a single-crystalline-silicon XY-stage is fabricated by using a double-sided bulk-micromachining technology. For defining different electrostatic actuators in one ordinary wafer (instead of SOI wafer), a trench-sidewall electric isolation method is developed. Previously insulator-refilled trench-bars are used to cut and isolate the different comb-drive...
Grating moving light modulator, a MEMS-based movable diffraction grating with electrostatic actuation, can be used for projection displays and relevant applications, its dominant power exchange is between the 0th and plusmn1st order by modulating phase of incident light, two optical collecting systems based on 0th, plusmn1st order operation are designed and analyzed with Fraunhofer diffraction theory...
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