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Mach Zehnder type optical modulators with modified ridge structure on a coplanar waveguide traveling wave electrode are investigated by the use of finite element method and BPM CAD waveguide software. The two ends of conventional ridge structure added taped ridge structures is considered, the transmission loss is obviously reduced. It is shown that the device increased modified ridge structure can...
Nanoscale tweezers are integrated to deep reactive ion etching (DRIE)-processed microelectrodes by localized chemical vapor deposition using focused ion beam (FIB-CVD). The MEMS electrodes for electrostatic actuation of nano tweezers are fabricated on a heavily doped SOI wafer, which works as the interconnecting platform to control nanoscale device from macro-world. Unlike the carbon nano tube (CNT)-based...
Through studying the micropump and microvalve used in microfluidic control chemical analysis from the design of structure, working principle and fabrication process, a novel PZT-driven micropump was developed. The construction and the fabrication process are quite simple. It consists of flexible PDMS pump diaphragm, base plate and piezo-bimorph actuator. Diaphragm, meanwhile, is an active valve whose...
The paper presents a new design of resonant miniature electrostatic field sensors (EFS) based on surface micromachining process. With a phase and an amplitude closed loop feedback control, the sensor can be adjusted automatically to operate at its resonant frequency in despite of the temperature influence. For minimizing the capacitive feedthrough, a feedback detecting loop is utilized in the design...
In recent years, a new fiber optic position sensing technology with holographic variable line-space (VLS) plane grating is developed. The period of VLS plane grating is about less than 10 micron. The grooves of the holographic VLS plane grating are not straight in general. Due to the grooves bend of 2-D holographic VLS plane gratings, measurement errors of the position sensor are inevitable when the...
Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction...
A three-dimensional microprobe, which is capable of measuring the forces exerting on the probing pin in all directions, is presented. The microprobe is fabricated on stainless steel and is covered by two sets of piezoelectric transducers. One of the transducers drives the probe, and the other senses the dynamic response to identify the contact between the pin and obstacles. A theoretical model is...
This paper demonstrates a low cost MEMS variable optical attenuator (VOA) with high performance for the wavelength division multiplexed (WDM) applications. Two single-mode fibers (SMFs) are used as the input and output of VOA. A shutter is actuated into the optical path by an electrostatic comb-type actuator. The device is fabricated on a single silicon wafer by a novel simple bulk-silicon micromachining...
In order to avoid the displacement of the AFM cantilever in surface forces measurement, a force-balanced MEMS sensor is developed. The probe of the sensor is a pendulous micromachined sensing element, which can be considered as a pair of differential capacitors. When the sensor is designed as a closed-loop system, the electrostatic force feedback can balance the surface force supplied on the sensing...
To enable MEMS designers to create fabrication-ready models of MEMS devices in an intuitive environment, this paper describes a MEMS design strategy that uses parameterized three-dimensional (3D) part features to construct geometric models of MEMS devices and then generates mask-layouts and process flows automatically. SolidWorks, an outstanding 3D design tool, is utilized to build the 3D model of...
A carbon nanotubes cathode was prepared by chemical vapor deposition (CVD) method on silicon substrate, and a field emission display with the carbon nanotubes cathode was fabricated by the vacuum-fluorescent-display-like package processes. Both the power supply voltage and the device voltage were measured at the same time. Very ideal current-voltage characteristic and luminance - voltage characteristic...
MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with...
This paper presents the effect of driving waveform for piezoelectric bend mode inkjet printhead with optimized mechanical design. Experimental and theoretical studies on the applied driving waveform versus jetting characteristics were performed. The inkjet head has been designed to maximize the droplet velocity, minimize voltage response of the actuator and optimize the firing frequency to eject ink...
MEMS-based integrated temperature, humidity and pressure (THP) sensor has the advantages of small size, low cost, easy integration and is a highly advanced apparatus of identity, reliability and easy production. The principle and structure of the integrated THP sensor are analyzed in this paper in short, and it also provides the measuring methods and circuits in detail. The outcome of measurement...
Micro wire electrical discharge machining (Micro-WEDM) has proved to be a versatile micro-machining technology to produce complex part. Therefore, a Micro-WEDM setup is developed to fabricate micro parts. Experiments were done on the micro-WEDM. Experiment analyzing results show that the white layer is no more than 2mum, the surface roughness (Ra) is smaller than 0.1mum, and the surface recast layer's...
A 3-port MEMS switch for MEMS phase shifter is present, with bias electrodes physically insulated from RF/microwave transmission line, which are designed for lower crosstalk between bias and microwave signal. The RF/microwave performances of these switches are optimized by 2.5 dimension electromagnetic (EM) field-solvers of ADS/Momentum. The mechanical structure of the switch is optimized by electromechanical...
In this paper, for the first time, an insulated gate bipolar transistor with an improved buffer is proposed to improve the IGBT losses. The structure of the proposed device is almost identical with that of the conventional IGBT, except for the buffer layer which is formed by employing a very highly doped stripped n+ and a weakly doped n" structure. Compared with the conventional PT-IGBT, the...
This paper presents the optimized design of a novel Focal Plane Array (FPA) structure for opt-mechanical uncooled infrared imaging system. The FPA structure is a bi-material micro-cantilever array which without Si substrate and with thermal isolation organ. In the paper, we build up series of model to describe the structure's IR absorb, heat exchange and thermal-mechanical characters. To optimize...
The latest generation of gigahertz-clock-rate CPUs is becoming more challenging to fit into designs. These chips are squeezing into tighter and tighter spaces with no enough places for heat to dissipate. Meanwhile, high-capacity cooling options remain limited for many small-scale applications such as microsystems, sensors and actuators, and micro/nano electronic components. This work presents a MEMS...
Self-welded double-wall and multi-wall carbon nanotube (DWCNT and MWCNT) bridges were used for the first time as nano-scale piezoresistors to monitor vibration and deformation of silicon cantilever beams. The CNTs were grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon-on-insulator posts situated over cantilever beams such that when the beams were deformed,...
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