Large-scale processes have become common, and fault detection for such processes is imperative. This work studies the data-driven distributed local fault detection problem for large-scale processes with interconnected subsystems and develops a genetic algorithm (GA)-regularized canonical correlation analysis (CCA)-based distributed local fault detection scheme. For each subsystem, the GA-regularized CCA is first performed with its all coupled systems, which aims to preserve the maximum correlation with the minimal communication cost. A CCA-based residual is then generated, and corresponding statistic is constructed to achieve optimal fault detection for the subsystem. The distributed fault detector performs local fault detection for each subsystem using its own measurements and the information provided by its coupled subsystems and therefore exhibits a superior monitoring performance. The regularized CCA-based distributed fault detection approach is tested on a numerical example and the Tennessee Eastman benchmark process. Monitoring results indicate the efficiency and feasibility of the proposed approach.