In this paper, a verification routine is developed for validating extremely fast pulsed I–V and transient current measurement setups. The measurements performed for the routine include pulsed I–V measurement with different pulse widths (using several voltage and current levels) as well as transient current measurement using different heating and measurement current levels. All the measurements are carried out for several discrete resistors attached on on-wafer test carriers. To demonstrate the usability of the setup, pulsed I–V and transient current measurement results of a THz Schottky diode are presented after the verification routine.