An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum flow rate of 27.19 µl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.