In this work, a dry decomposition process of sulfur hexafluoride (SF6) gas is experimentally investigated in follows: the first procedure to electrochemically decompose the SF6 molecules by silent discharge impacts and the second procedure of chemical fixation of some by-products on absorbent materials. The experiment conducted to examine an influence factor on SF6 decomposition rate for atmospheric pressure discharges and the chemical fixation on calcium hydroxide (Ca(OH)2). As an experimental result, it became clear that the decomposition rate was indicated with a rate law of primary reaction for the SF6 concentration. The application of the chemical fixation on Ca(OH)2 was enabled us to remove the toxic by-products except SO2F2 molecules, and this fact indicated utility of the dry processing as recycling technology.