Low temperature (30 < T < 300 K) internal friction in a metallic glass Ni 60 Nb 40 subjected to preliminary inhomogeneous deformation by cold rolling, homogeneous tensile deformation or electrolytic charging with hydrogen is investigated. Cold rolling or hydrogenation result in appearance of similar internal friction peaks and hysteresis damping. Homogeneous deformation has no influence on low temperature internal friction. The phenomenon of microplastic deformation during hydrogenation of weakly stressed samples is revealed. It is argued that microplastic deformation of metallic glasses during hydrogenation without external stress takes place too. Plastic flow both on cold rolling and hydrogenation occurs via formation and motion of dislocation-like defects which are the reason of the observed anelastic anomalies. It is concluded that low temperature internal friction peaks described in the literature for “as-cast”, cold deformed and hydrogenated samples have common dislocation-like origin.