TiN fine powders were prepared by the reaction of TiH 2 with ammonium chloride at various temperatures under a flow of N 2 /H 2 mixed gas. In a temperature range of 500-800 o C, the powder samples obtained had a particle size of 3-20nm, and a specific surface area of 30-60m 2 /g. The particle size increased with the increase of the reaction temperature. The lattice parameters and the chemical analysis data showed that the TiN powder had the stoichiometric composition. The TiN powder prepared at temperatures of 600-800 o C showed superconductivity with a transition temperature of 4.0-4.5K.