The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
A sheath is generated over the rf biased substrate in etching processes, its properties play an important role in determining the transport of reactant species including ions and neutrals toward the substrate, as well as the surface reactions, and as a consequence the evolution of the etching profile. In this work, a multi scale model including the global, sheath and trench model is applied to simulate...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.