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Rarefied gas flows in narrow spaces are affected by the surface roughness of walls of the passage, but the interaction between gas molecules and solid surfaces has not been understood sufficiently. The effects of surface roughness on the conductance of passages composed of two flat plates are studied experimentally and theoretically. In order to simplify the conditions for calculation, two dimensional...
Smoothing of a pure titanium surface by irradiation of an intense pulsed ion beam (IPIB) with a power density of 76MW/cm 2 and a pulse width of 65ns has been studied experimentally and numerically. Surface roughness of the IPIB irradiated titanium reduces to 16 of that of the IPIB non-irradiated titanium. A high-frequency component in the envelope of the titanium surface is decreased after...
One of the more important aspects of ion bombardment modification of surface morphology of solids is surface roughness. In spite of a large number of publications concerning the first mentioned surface property (i.e. morphology), information about the influence of ion sputtering on the roughness is rather sparse. Taking into account the importance of the question in various branches of science and...
This is a short review of surface morphological changes induced by ion sputtering of solids (mainly biocompatible materials) as well as potential and practical biomedical applications of the sputtering process. Usually changes of two aspects of surface morphology are studied, i.e. surface topography and roughness. It can be generally accepted that, among other factors which affect the so-called biological...
ITO (Indium-tin-oxide) thin films were obtained by a DC magnetron sputtering for different thicknesses at room temperature. The thickness, microstructure, surface roughness (δ), refractive index (n), energy band gap (E g ) and the sheet resistance of the ITO films were investigated by the transmission, absorption, specular and diffuse reflection spectra in the range of UV-Vis-NIR. The surface...
CuInSe 2 thin films have been obtained by sequential evaporation of stacked Cu and In layers, and subsequent chalcopyrite formation using elemental Se within a close-spaced graphite container placed into a newly developed vacuum environment with flowing nitrogen. Semiconductor CuInSe 2 formation has been achieved by heating the metallic precursors at temperatures as high as 400 ...
Surface roughness is one of the most important aspects of ion-bombardment-induced modification of surface morphology of solids. It also plays or could play an important role in microelectronics, surface analysis, medicine and other branches of science and technology. The paper presents the fractal analysis of stainless steel surface roughness profile generated by a normal broad argon ion beam irradiation...
One of the most important factors which affect solid surface roughness is an ion incidence angle and glancing-angle irradiation seems to be crucial in surface smoothing. The object of our interest was polycrystalline 99.5% titanium polished by a very inclined neutralized ion beam from the glow discharge (GD) ion gun. This paper presents the influence of some important factors: (a) ion dose and kind...
A study of ruthenium dioxide films, deposited by an MOCVD method on Si/SiO 2 , Si/YSZ, LaAlO 3 , MgO, SrTiO 3 , and sapphire single crystal substrates, was performed using RBS, ERD and AFM methods with the aim to characterize the elemental composition, microstructural quality, and homogeneity of the films. The element depth distribution and thickness of the ruthenium oxide...
Magnetron sputtered amorphous carbon nitride films were annealed at different temperatures (450-900 o C) and time (30-120min). Compositional, bonding structural and surface morphological modifications of the films were characterized by Fourier transformation infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy. The as-deposited film was found to...
A three-dimensional kinetic Monte Carlo technique has been developed for simulating the growth of thin Cu films. The model involves incident atom attachment, surface diffusion of the atoms on the growing surface and atom detachment from the growing surface. A significant improvement in calculation of activation barriers for the surface atom diffusion on the growing film was made. The related effects...
In this paper, the comparative tribological property of 9Cr18 friction pair used for aerospace components was investigated using a ball-on-disc tester in four different service conditions: in air, in vacuum, and with or without MoS 2 -based film. The results indicate that the friction coefficients of the 9Cr18 couplings with MoS 2 solid lubrication or in vacuum are much lower than...
Magnesium oxide (MgO) films were prepared by RF sputter deposition technique, and their secondary electron emission (SEE) coefficient was examined in relation to film thickness and surface morphology. The optical constant and film thickness were evaluated from the optical transmission spectroscopy for samples prepared on the glass substrate. The ion-induced SEE coefficient was measured for MgO films...
Mo and W thin films and Mo/Si/Mo and W/Si/W tri-layers have been deposited by r.f. magnetron sputtering on c-Si substrates as a precursor to the fabrication of Mo/Si and W/Si multilayer X-ray mirrors. The Phase Modulated Spectroscopic Ellipsometry (SE) technique has been used for characterizing the single layer films to derive information regarding the thickness and volume fraction of voids present...
The surface roughness of hydrogen silsesquioxane (HSQ) as a negative tone electron beam (EB) resist has been studied as a function of exposure dose, developer concentration, and pre-exposure bake temperature.In the range of low exposure doses, the surface roughness of HSQ drops rapidly with an increase in the dose. It levels off at about 1nm around the dose at which the respective contrast curve saturates...
Surface roughness, which plays or could play an important role in microelectronics, surface analysis, medicine and other branches of science and technology, is one of the more important aspects of ion bombardment-induced modification of surface morphology of solids. The results of profilometric and microscopic experiments showed dependence of measured surface roughness parameters upon the length of...
This study aims at analyzing the hydrophobicity of a wide range of fluorine–carbon coatings, from carbon-rich to fluorine-rich materials, carried out within the framework of a search for snow- and ice-repellent materials. A simple model accounting for both surface chemical composition and roughness was applied to evaluate the wettability of various fluorocarbon coatings. Apparent contact angles of...
Silicon carbide was etched in a NF 3 /CH 4 inductively coupled plasma. Surface roughness measured by atomic force microscopy was investigated as a function of process parameters. Both etch rate and dc bias were correlated to the surface roughness. To optimize the surface roughness, a 2 4 full factorial experiment was conducted for 700–900W source power, 50–150W bias power,...
Aluminum nitride (AlN) films were grown on sapphire substrates by radio frequency (RF) magnetron sputtering in plasma containing a mixture of argon and nitrogen, using a pure aluminum target. The effect of RF power was investigated with respect to growth rate, surface roughness, and transmittance of AlN films. As the RF power increases, the growth rate increases and the root mean square of surface...
A technique to characterize the nonuniformity of surface roughness (NSR) is presented. A discrete wavelet transformation (DWT) was used to quantitatively differentiate surface patterns. The technique was evaluated with the data collected from the etching of silicon oxynitride films in a C2F6 inductively coupled plasma. 3-D surface images were obtained by using atomic force microscopy. Vertical and...
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