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The effect of plate electrode area on the deflection of a symmetric circular bimorph piezoelectric micromachined ultrasonic transducer (pMUT) with clamped and simply supported boundary conditions was studied for the first time. Distinct plate displacement shape functions were defined for the regions underneath and outside the active electrodes. The plate shape functions were solved analytically using...
This paper describes an optimization method of the top electrode size for a thin film matrix ultrasonic transducer (M-UT) in the frequency range above 200MHz. The goal of this work is to design an optimal top electrode size for an M-UT providing the maximal output peak–peak voltage (V PP ) and the maximal signal-to-noise ratio (SNR) without additional electrical impedance matching. In order...
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