A high repetition rate picosecond laser system is combined with a spatial light modulator (SLM) for diffractive multiple beam processing. The effect of the zero order beam is eliminated by adding a Fresnel zone lens (FZL) to defocus the un-diffracted beam at the processing plane. Chromatic dispersion, which is evident with a large bandwidth femtosecond pulses leading to the problem of distorted hole shape is eliminated due to the much narrower spectral bandwidth, ∼0.1nm at 10ps pulselength, resulting in highly uniform intensity spots, independent of diffraction angle. In addition, high-throughput processing is demonstrated by combining the high power laser output, 2.5W at λ≈1064nm and fast repetition rate, f≈20kHz with P>1.2W diffracted into 25 parallel beams. This has the effect of creating an “effective” repetition rate of 500kHz without restrictive scan speeds.