Materials Science Poland > 2008 > Vol. 26, No. 1 > 189--194
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journal ISSN : | 2083-1331 |
journal e-ISSN : | 2083-134X |
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Bibliography
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[1] TRELLENKAMP S., MOERS J., VAN DER HART A., KORDOS P., LUTH H., Microelectr. Eng., 67–68 (2003), 376.
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[2] PEUKER M., LIM M.H., SMITH H.I., MORTON R., VAN LANGEN-SUURLING A.K., ROMIJN J., VAN DER DRIFT E.W.J.M., VAN DELFT F.C.M.J.M., Microelectr. Eng., 61–62 (2002), 803.
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[3] CHEN Y., TAO J., ZHAO X., CUI Z., SCHWANECKE A.S., ZHELUDEV N.I., Microelectr. Eng., 78–79 (2005), 612.