Open Physics > 2013 > 11 > 2 > 219-225
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journal ISSN : | 2391-5471 |
DOI | 10.2478/s11534-012-0166-0 |
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[1] R. Doering, Y. Nishi, Handbook of Semiconductor Manufacturing Technology, 2nd edition (CRC Press, Taylor and Francic Group, New York, 2008)
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