In this work, the differences in nanomechanical properties, topography and morphology of carbonpalladium (C-Pd) films were studied. These films were prepared with a Physical Vapour Deposition method on various substrates with different technological parameters. We show that duration of the PVD process is a crucial factor affecting the palladium content in these films. The differences in thickness of films depend on the distance between source boats and substrates. The nanomechanical properties of C-Pd films were studied with nanoindentation. Their topography and morphology was ascertained with Atomic Force Microscopy and Scanning Electron Microscopy. It was found that the mechanical properties of C-Pd films depend on the content of palladium and on the morphology and topography of these films. The various types of carbon-palladium films containing palladium nanograins incorporated in a carbon matrix that were, investigated in this paper, seem to be promising materials for numerous applications.
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