Operation modes of the FALCON ion source as a part of the AMS cluster tool

Oleksii Girka; Alexander Bizyukov; Ivan Bizyukov; Michael Gutkin; Sergei Mishin

doi:10.1515/nuka-2015-0059

Operation modes of the FALCON ion source as a part of the AMS cluster tool

Oleksii Girka, Alexander Bizyukov, Ivan Bizyukov, Michael Gutkin, Sergei Mishin

Source

Nukleonika > 2015 > 60 > 2 > 327-330

Abstract

The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defined range of operational frequencies. The paper focuses on the preparation of large wafers with SiO₂ and AlN/Si₃N₄ depositions. Stability of the intermediate SiO₂ layer is achieved by combining high power density UV radiation with annealing in high humidity environment. A uniform thickness of the capping AlN layer is achieved by local high-rate etching with a focused ion beam emitted by the FALCON ion source. Operation parameters and limitations of the etching process are discussed.

Identifiers

journal ISSN :	0029-5922
DOI	10.1515/nuka-2015-0059

Authors

Oleksii Girka

V. N. Karazin Kharkiv National University, 4 Svobody Sq., 61022, Kharkiv, Ukraine

Alexander Bizyukov

V. N. Karazin Kharkiv National University, 4 Svobody Sq., 61022, Kharkiv, Ukraine

Ivan Bizyukov

V. N. Karazin Kharkiv National University, 4 Svobody Sq., 61022, Kharkiv, Ukraine

Michael Gutkin

Micron Surface Technologies, 5033 Dantes View Drive, Calabasas, CA 91301, United States

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Keywords

FALCON ion sourcem surface wave cluster tool

Additional information

Publication languages: English

Data set: PSJD

Publisher

De Gruyter Open

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Bibliography

RELATION NAME
2. Willingham, C. B., Parker, T. E., & Spooner, F. H. (1976). U.S. Patent no. 3,965,444. Washington, D.C.: U.S. Patent and Trademark Office.
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Oleksii Girka

Alexander Bizyukov

Ivan Bizyukov

Michael Gutkin

Keywords

Additional information

Publisher

Fields of science

Fields of science

Bibliography

RELATION NAME

2. Willingham, C. B., Parker, T. E., & Spooner, F. H. (1976). U.S. Patent no. 3,965,444. Washington, D.C.: U.S. Patent and Trademark Office.

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Operation modes of the FALCON ion source as a part of the AMS cluster tool