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Photodiodes are used as easy-to-operate detectors in the extreme ultraviolet (EUV) spectral range. The Physikalisch-Technische Bundesanstalt (PTB) calibrates photodiodes with a 0.3% or better relative uncertainty for the spectral responsivity. These calibrations are based on the comparison of the photodiodes to a cryogenic electrical substitution radiometer as primary detector standard using monochromatized...
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