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Cr-C coatings containing different amount of carbon ranging from ∼5 to 50at.% were prepared by the direct current (DC) magnetron sputtering on a polished substrate of polycrystalline silicon. The thickness of the samples was about 400nm. We characterized the composition and the structure of the as-received coatings and those annealed at 500°C by X-ray diffraction (XRD), Energy dispersion X-ray spectroscopy...
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