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This paper presents the design, fabrication, and performance of a $256 \times 256$ multiband infrared (IR) focal plane array (FPA) using microbimaterial cantilever as the sensitive pixel. Different from traditional uncooled IR FPA that works only at long wavelength IR, the working bandwidth of the presented FPA is extended to full band IR, covering the three IR atmospheric windows of 1–$2.5~\mu $ ...
In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated...
The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs with and without comb offset, a novel asymmetric mirror plate was designed to introduce an imbalance. It was found that all the three designs can be actuated...
An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror's performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model...
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