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N-type InAs single crystals have been studied by local vibrational mode (LVM) spectroscopy, photoluminescence spectroscopy (PL), glow discharge mass spectrometry (GDMS) and Hall effect measurement, respectively. Carbon–hydrogen complex defects CH3 and CH2 are detected in as-grown and annealed samples. After annealing, CH3 dissociates and more CH2 is formed. Results of PL and Hall measurement suggest...
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