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MEMS acceleration sensors have been systematically analyzed across a wide temperature range between -40°C and +85°C. Failure mechanisms such as offset drift induced by thermal mismatch of different materials are well understood. However, in densely packed electronic devices (e. g., smartphones) distances between neighboring components are very small. Thus, power intensive components like microprocessors...
Due to manufacturing uncertainties and due to geometric constraints on the moving structure, the drive mode of MEMS gyroscopes may exhibit high intrinsic nonlinearity [1,5]. The type of the drive mode nonlinearity is mainly quadratic in amplitude [5,6]. Thus, a cubic nonlinearity term can account for the geometric nonlinearities of the structure [4–7]. Here, we present a method to model the drive...
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