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On-chip coil integrated superconducting tunnel junction (OC 2 -STJ) has been demonstrated for high performance X-ray detector. The STJ was fabricated by an improved fabrication technique based on a high quality Nb/Al/AlO x /Nb junction technology. The STJ shows high quality current-voltage characteristics with an ultra-low leakage current of a few nA at 0.4 K for 100μmx100μm junction...
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